The most important application of a krypton fluoride laser is in photolithography, for the manufacture of microelectronic devices. Use of this laser for lithography has not only replaced the use of mercury-xenon lamps, but has also provided much more precise and finer resolution solutions to photolithography techniques. Some of the other applications of the krypton fluoride laser are given below:
Nuclear fusion energy research.
Production of soft X-rays from plasma.
Micromachining of materials such as plastics, crystals, and composites.
Medical therapy and surgery.
Dental surgery.
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